http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201530775-A

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filingDate 2014-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201530775-A
titleOfInvention Field effect transistor structure and manufacturing method thereof
abstract In some embodiments, a field effect transistor structure includes a body structure, a plurality of dielectric structures, a gate structure, and a source or drain region. The gate structure is formed on the body structure. The source or drain region is embedded in the body structure adjacent to the gate structure and extends beyond the dielectric structure. The source or drain region contains a stressor material that is constant different from the lattice constant of the bulk structure. The source or drain region includes a first region and a second region. A first region is formed on a first level of the top of the dielectric structures. The second region includes a downwardly tapered sidewall and is formed below the first horizontal plane and abuts the corresponding dielectric structures.
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Total number of triples: 24.