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publicationDate 2015-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201530109-A
titleOfInvention Pressure sensor, acceleration sensor and pressure sensor manufacturing method
abstract According to an embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing provided on the first surface element. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and Provided is a first intermediate layer between the first magnetic layer and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, and one of the third magnetic layer and the second film a fourth magnetic layer, and a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer.
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