| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B41-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F7-0273 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate |
2014-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc0130885384c1e6eddfd1daa5d249b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12d7c5dcb256ab083b9e77c00ce1af34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbed42c249a7603ed024e4711f5aad1b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dd1405e9c96a9468a3da637bb8f9a7d |
| publicationDate |
2015-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201528354-A |
| titleOfInvention |
CMP equipment using magnetic reaction composites |
| abstract |
The embodiments described herein are generally directed to apparatus and methods for magnetically reactive chemical mechanical polishing. In one embodiment, a device is provided that includes a support having one or more magnetic field generators, one or more magnetic field generators formed in the support. The magnetic field generator can generate at least one magnetic field. The magnetically reactive composite is positioned to be magnetically coupled to the magnetic field generator. When the magnetic reaction complex receives a magnetic field from a magnetic field generator, the magnetic reaction complex changes shape. |
| priorityDate |
2013-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |