http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201528322-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2014-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3ad19474b95e07a88f2776aee05a580 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40981537bdc9f01d10f89feb939bdd5d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_596983d05c56b053922c48193402d588 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6167174cc2f14c9b4dfd51e4167c9d78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cabeb31fe8433fda9e8b884c3a66a94a |
| publicationDate | 2015-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201528322-A |
| titleOfInvention | Control of etch rate using modeling, feedback, and impedance matching |
| abstract | A method for achieving an etch rate is described. The method includes receiving a calculated variable associated with processing a workpiece within a plasma chamber. The method further includes passing the calculated variable through a model to generate a value of the calculated variable at an output of the model, identifying a calculated processing rate associated with the value, and identifying a predetermined process based on the calculated processing rate rate. The method also includes identifying a predetermined variable to be achieved at the output based on the predetermined processing rate, and identifying characteristics associated with the real and imaginary parts of the predetermined variable. The method includes controlling a variable circuit component to achieve the characteristics to further achieve the predetermined variable. |
| priorityDate | 2013-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.