http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201527353-A

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filingDate 2014-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79bfbc81d228399b20570a67f88bd9c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca5c9f676ec89441466810ab60c6b53b
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publicationDate 2015-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201527353-A
titleOfInvention Forming a composition of the photoresist underlayer film
abstract An object of the present invention is to provide a dendrimer compound which can improve critical dimension uniformity and depth of focus, and a composition which can form an underlayer film.nThe solution of the present invention is a dendrimer, and a composition comprising the same for forming an underlayer film, wherein the dendrimer comprises a branch centered on an aromatic skeleton and containing a guanamine bond or an ester bond and an aromatic skeleton chain.
priorityDate 2013-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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