abstract |
An object of the present invention is to provide a dendrimer compound which can improve critical dimension uniformity and depth of focus, and a composition which can form an underlayer film.nThe solution of the present invention is a dendrimer, and a composition comprising the same for forming an underlayer film, wherein the dendrimer comprises a branch centered on an aromatic skeleton and containing a guanamine bond or an ester bond and an aromatic skeleton chain. |