http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201525467-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-31905 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2879 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2862 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-067 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate | 2014-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db03501a6b9f568bda927ba73f0f7554 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5576769f1e89580e8427935115ed242d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ce376faa8b25ff35a5d3fc23d90afa5 |
| publicationDate | 2015-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201525467-A |
| titleOfInvention | Probe device |
| abstract | When the electrical characteristics of the semiconductor element are inspected at the wafer level, it is possible to easily and efficiently prevent the occurrence of light (discharge) in the vicinity of the wafer surface.nIn the probe device, the spark preventing mechanism (50) has a surrounding member (52) surrounding the probe (26S, 26G) between the probe card (16) and the mounting table (12); And the gas supply means (54), when the electrical characteristics of each of the wafers (power elements) are inspected on the semiconductor wafer (W), a predetermined pressure higher than atmospheric pressure is formed around the probes (26S, 26G). In an environmental manner, gas is supplied to the periphery of the probes (26S, 26G) via the inside or the vicinity of the surrounding member (52). The contact plate (34) also serves as a surrounding member (52). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I759588-B |
| priorityDate | 2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419573697 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9397 |
Total number of triples: 22.