http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201522596-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2014-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfad1fdfef6126bcbec463e5b8ae370c |
| publicationDate | 2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201522596-A |
| titleOfInvention | Honing composition, honing method, and method of manufacturing substrate |
| abstract | The polishing composition of the present invention is used for polishing a polishing object having a layer containing polycrystalline germanium, and the polishing composition contains abrasive grains and an oxidizing agent, and has a pH of 6 or more. As the abrasive grains, a citric acid gel is preferably used. Further, the polishing method of the present invention is characterized in that the object to be polished is polished by using the polishing composition, and the object to be polished has a layer containing polycrystalline germanium. Further, the method for producing a substrate of the present invention is characterized by comprising a polishing step of polishing a substrate by the above-described polishing method, the substrate having a layer containing polycrystalline germanium. |
| priorityDate | 2013-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 137.