http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201521070-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed89ca88042d3b6f7afc21d7b6dd7b87 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate | 2014-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dc7baf09b8832629e21c1b11ccb7c3f |
| publicationDate | 2015-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201521070-A |
| titleOfInvention | Device and ion implantation system for providing electrons to a substrate |
| abstract | In one embodiment, an apparatus for providing electrons to a substrate includes a plurality of spiral wave plasma sources arranged as an array of spiral wave sources, wherein each spiral wave plasma source includes a configuration configured to produce a parallel to the first axis a helical antenna of a wave vector; and a magnet configured to generate a magnetic field vector parallel to the first axis, wherein each spiral plasma source is further configured to generate a corresponding inverse to a magnetic field vector of a nearby spiral wave plasma source Magnetic field vector. |
| priorityDate | 2013-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 |
Total number of triples: 15.