http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201518556-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-16 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-30 |
filingDate | 2014-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_851e2c94a4083c0d3e8ee96cb2497fb9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dd1c7459e7381125fb87da4168d9432 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5e9575084dab9bb13e8a22271ed22fb |
publicationDate | 2015-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201518556-A |
titleOfInvention | Tin alloy plating device and tin alloy plating method |
abstract | It is an object of the present invention to provide a tin alloy plating apparatus which is easy to manage a tin alloy plating solution containing a tin ion concentration and an acid concentration.nIn order to achieve the above object, the tin alloy plating apparatus of the present invention comprises: a plating tank 10 in which an insoluble anode 12 and a substrate W face each other; and a plating liquid circulation line 32 to make the plating The tin alloy plating solution in the tank 10 is circulated; the tin is supplied to the storage tank 60, and electrolysis is performed in the presence of the tin alloy plating solution to replenish the tin ions and the acid which stabilizes the tin ions to the tin alloy plating solution, and then The tin alloy plating solution supplied with tin ions is returned to the plating tank 10; and the dialysis unit 48 removes acid from the tin alloy plating solution, and then the tin alloy plating solution is returned to the plating tank 10. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113825861-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I700399-B |
priorityDate | 2013-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.