http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201518547-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_15bd6a1febacd9542fb1af4a1d3a32e2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2013-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c51f228f54c07a62cd831be2c20187b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2f998dc15b6015a0d21dc9771c9feb3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c542d79326d725901e8c239b53fdbe4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a34b707f933687a6796fb3c8504b52e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d40f6762dedada224534d3cbb7e30ec9 |
| publicationDate | 2015-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201518547-A |
| titleOfInvention | Etching liquid composition and etching method |
| abstract | An etching liquid composition for etching a copper-containing and molybdenum-containing multilayer film, the etching liquid composition comprising hydrogen peroxide, a first organic acid or a salt thereof, a second organic acid or a salt thereof, and an alcohol amine compound. The first organic acid has a chelation constant with copper greater than, equal to 0 and less than 6, and the first organic acid is added in an amount of from 5.5 to 17.5 weight percent based on the etching liquid composition. The second organic acid has a chelation constant with copper greater than, equal to 6, and less than 18.5. The alcohol amine compound has one or more amine groups and one or more hydroxyl groups. The etchant composition etches the copper-containing and molybdenum-containing multilayer film to help reduce metal residue. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I731962-B |
| priorityDate | 2013-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 151.