| abstract |
The present invention discloses a fluid storage and dispensing device comprising a fluid storage and dispensing container in the shape of a rectangular parallelepiped, and an integrated gas cabinet assembly and/or a point-of-use exhaust gas scrubber in the exhaust cabinet including the fluid storage and dispensing device . By using a physical adsorbent and a chemisorbent medium, the gas cabinet can be improved by safe operation, wherein the process gas supplied from the gas cabinet has toxic or detrimental characteristics. |