| abstract |
The present invention discloses a filled polymer composition having improved plasma resistance. The composition includes a particulate filler dispersed in a polymer matrix. The particle filler may be niobium pentoxide (Nb2O5), ytterbium trifluoride (YF3), aluminum nitride (AlN), tantalum carbide (SiC) or tantalum nitride (Si3N4) and rare earth element oxides ( Rare earth oxide). In one embodiment, the composition is utilized as a bonding adhesive for an electrostatic chuck, a bonding adhesive for a showerhead, a bonding adhesive for a liner, a sealing material, an O-ring, or a plastic component. |