| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0213 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02104 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2009-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d145d1bc3dc84a6835d453cfc808a1ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06610037564f839ef8e148b783df43f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d18f0487e15e20cdfed4eeb81349f3cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b4ccd24ad666c4a3d3c26f351768e7a |
| publicationDate |
2015-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201506978-A |
| titleOfInvention |
Protective coating layer of plasma processing chamber parts and using method thereof |
| abstract |
An RF return-back strap coated with a flexible polymer or elastomer is used in the plasma chamber to protect the RF strap from free radicals (such as fluorine or oxygen radicals) generated by the plasma. And providing a semiconductor substrate processing method for reducing particulate contamination in a plasma processing apparatus. This coated RF strap minimizes the generation of particulates and exhibits a lower erosion rate than uncoated components. Such a coating member having a flexible coating on the electrically conductive flexible substrate member is provided with an RF ground return and is configured to allow one or more electrodes to move within the adjustable gap capacitive coupling plasma processing chamber. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I777045-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I795969-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11670515-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I758669-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I737526-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I805226-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I624895-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I754352-B |
| priorityDate |
2008-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |