http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201504411-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2014-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88e44ad8fa6c8d11c6b2a7c7b658b8df http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a0ad4e71e50f3e30672e4901b61a7f4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb3d64cda0b6cda0b579986e2ed52719 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f245d7f9514496de0baf3bfd5325f289 |
| publicationDate | 2015-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201504411-A |
| titleOfInvention | Use of a chemical mechanical polishing (CMP) composition for polishing a substrate or layer comprising at least one Group III-V material |
| abstract | The present invention describes the use of a chemical mechanical polishing (CMP) composition for polishing a substrate or layer comprising one or more Group III-V materials, wherein the chemical mechanical polishing (CMP) composition comprises the following components: (A) Surface-modified cerium oxide particles (B) having a negative zeta potential ranging from 2 to 6 at a pH of from -15 mV to -15 mV or less, one or more components selected from the group consisting of: (i) not having a substituted and unsubstituted triazole of an aromatic ring fused to a triazole ring, (ii) benzimidazole, (iii) a chelating agent selected from the group consisting of amino acids having two or more carboxyl groups, aliphatic a group of carboxylic acids and their corresponding salts, and (iv) homopolymers and copolymers of acrylic acid and its corresponding salts, (C) watern(D) One or more other ingredients are optionally used, wherein the pH of the composition is in the range of 2 to 6. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I791599-B |
| priorityDate | 2013-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 112.