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filingDate 2014-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0521bf1bb12030465b72442048065ec2
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publicationDate 2015-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201500531-A
titleOfInvention Chemical mechanical honing slurry for organic film and honing method using same
abstract Disclosed herein is a chemical mechanical polishing slurry composition for an organic film. The chemical mechanical polishing slurry composition comprises at least one selected from a polar solvent or a non-polar solvent; and a metal oxide abrasive, wherein the composition is acidic, and the organic film has about 50 atomic % to A carbon content of 95 at%, and a grinding method using the same.
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priorityDate 2013-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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