http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201448212-A

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filingDate 2014-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2014-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201448212-A
titleOfInvention Tantalum carbide semiconductor device
abstract The tantalum carbide semiconductor device includes an element isolation layer and an electric field relaxation layer. The element separation layer is formed between the main cell region and the sensing cell region, from the surface of the substrate region until deeper than the aforementioned substrate region, and is separated into the aforementioned main cell region side and the aforementioned sensing cell region side . The electric field relaxation layer is formed from the bottom of the base region to a position deeper than the element isolation layer. The electric field relaxation layer is separated into the main cell region side and the sensing cell region side, and at least a part of the element isolation layer is disposed inside the separated portion of the electric field relaxation layer.
priorityDate 2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 31.