http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201445264-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 2014-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69875d2481269182d9c95420a9f6a248 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_855747e7e340253748d6ebd83963c7fb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21edf7339224a451937aa5eb58ad8473 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a72cce7a6c23c7171a348b8bea18746c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24a4494d9a391e594105bef260f4efcf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5074abf4ba3fd309405ae965664ea329 |
| publicationDate | 2014-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201445264-A |
| titleOfInvention | Photoresist stripper |
| abstract | The photoresist film which has been deteriorated by dry etching strongly adheres to the coated surface, and cannot be peeled off by the photoresist stripping liquid of the photoresist film on the peeled copper film. On the other hand, a peeling liquid for an aluminum film having a strong peeling force causes corrosion of the copper film. It is desirable to have a photoresist film which can be peeled off by the plasma and which can be substantially prevented from corroding even if the substrate is a copper film or even an aluminum film. A photoresist film characterized by containing a tertiary alkanolamine, and a polar solvent, and water, and a cyclic amine, and a sugar alcohol, can be peeled off by a dry etching, and even if the substrate is a copper film or aluminum The film also does not substantially corrode. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I705157-B |
| priorityDate | 2013-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 100.