| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a013f27aee93b16ee05c95b0d161b734 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2079-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2907-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2907-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513 |
| filingDate |
2013-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f24a396be175571a69090e8ac23e3e25 |
| publicationDate |
2014-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201443269-A |
| titleOfInvention |
Method for preparing diamond-like carbon-carbonized composite film |
| abstract |
A method for preparing a diamond-like carbon-carbide composite film, comprising the steps of: vacuuming a plasma reactor; introducing a carbon-containing gas, a helium-containing gas, and a working gas into the plasma reactor; and turning on the electricity The slurry reactor causes the working gas to form a plasma to impinge on the carbon-containing gas and the helium-containing gas, and the carbon and helium gas generated by the cracking of the carbon-containing gas and the helium-containing gas react to form tantalum carbide The deposition forms a diamond-like carbon-carbonized composite film. |
| priorityDate |
2013-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |