| abstract |
The present invention discloses a composition comprising a graft block copolymer, a photoacid generator and a crosslinking agent, the graft block copolymer comprising a copolymer comprising a backbone polymer and a surface energy reducing portion The first graft polymer is grafted onto the backbone polymer, wherein the surface energy reducing portion comprises a fluorine atom, a germanium atom, or a combination of a fluorine atom and a germanium atom. |