http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201433533-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67772 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6773 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67393 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67376 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67373 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G45-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G47-74 |
| filingDate | 2013-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_627c50144f1f5f5cf8831c498e16ed15 |
| publicationDate | 2014-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201433533-A |
| titleOfInvention | Substrate processing device, lid opening and closing mechanism, shielding mechanism, and method for cleaning inside container |
| abstract | An object of the present invention is to provide a substrate processing apparatus capable of suppressing the amount of use of an inert gas or a dry gas while preventing a decrease in yield. In order to achieve the above object, the substrate processing apparatus 10 includes a loading module 13 and a lid opener 42 for FOUP (front open wafer cassette) having a main body 31, an opening 33, and a lid 32. 30, the cover 32 is removed such that the inside of the FOUP 30 communicates with the inside of the loading module 13 via the opening 33; the N2 gas supply unit 47 supplies N2 gas to the inside of the FOUP 30 mounted on the loading module 13; and two plate-like sliding The lids 43 and 44 are freely movable along the opening surface of the opening 33. The sliding lids 43 and 44 are close to each other until the gap therebetween is 1 mm to 3 mm, thereby being shielded from the loading module 13 to the loading mold. The opening portion 33 of the FOUP 30 of the group 13. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I688034-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I650825-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111696895-A |
| priorityDate | 2012-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.