http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201431869-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1d73fa1e6c11c539b9d7a008d58a786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02175 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C29-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C33-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02183 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02194 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-00 |
| filingDate | 2013-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f3aa15279a718e93d5a6774e3f4afc1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b38bb2bc9cabffba548aad1321ce8896 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a38628404a7baebca9e7016b6d990f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f0d2a51dabff606d1e7c00ed1bb7b27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecf38cc9a06ab9b08a49e7dc3f33b2c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8421d7941d2ae2e9bde62874c8e362be |
| publicationDate | 2014-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201431869-A |
| titleOfInvention | Group 5 metal side oxy-alkyl side oxy complex, method for producing the same, material for film forming, and method for producing group 5 metal oxide film |
| abstract | The present invention provides a Group 5 metal-side oxy-alkyl-side oxy complex represented by the formula (A) used as a material for film-forming used for producing a Group 5 metal oxide film, preferably a pass Group 5 metal-side oxy-alkyl-side oxy complex represented by formula (1), chemical formula (3), chemical formula (4) or chemical formula (5) and a process for producing the same. Production of a Group 5 metal-side oxy-alkyl-side oxy complex represented by the formula (A), preferably represented by the formula (1), the chemical formula (3), the chemical formula (4) or the chemical formula (5) a fifth group metal side oxy-alkyl side oxy complex, and a film solution material is prepared by containing a Group 5 metal side oxy-alkyl side oxy compound and an organic solvent, and a film forming method is used. A Group 5 metal oxide film was formed using the material solution. Mα(μ4-O)β(μ3-O)γ(μ-O)δ(μ-ORA)ε(ORA)ζ(RAOH)ηXθYι (A) (wherein M represents a ruthenium atom or a ruthenium atom. RA represents C1~C6 alkyl. X represents a C1~C8 alkylenedioxy group which may also be substituted by a phenyl group. Y represents a C2~C8 carboxyl group or an acetoacetone group which may also be substituted by a halogen atom. An integer of ~10, β represents 0 or 1, γ represents an integer of 0-8, δ represents an integer of 2-9, ε represents an integer of 0-6, ζ represents an integer of 6-16, and η represents an integer of 0-4. θ represents an integer of 0 to 2, and ι represents an integer of 0 to 6. wherein α~ι denotes an integer satisfying 5α=2(β+γ+δ+θ)+ε+ζ+ι) MA(μ4-O ) B(μ3-O)C(μ-O)D(μ-OtBu)E(OtBu)F (1) (wherein M represents a ruthenium atom or a ruthenium atom. A, B, C, D, E, F Representing the values of 10, 1, 8, 8, 0, 16, or 9, 1, 5, 9, 1, and 14, respectively) |
| priorityDate | 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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