http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201429618-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c389d310f52125a947b3408cb0cf3283 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
filingDate | 2013-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_005f9daeabc6c9ab3fc4d310b75447b1 |
publicationDate | 2014-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201429618-A |
titleOfInvention | Laminated polishing pad |
abstract | An object of the present invention is to provide a long-life laminated polishing pad which is not easily peeled off between the polishing layer and the buffer layer even when it is subjected to high temperature for a long time of polishing, and is polished for a long time. There is also no defect in the buffer layer. In the multilayer polishing pad of the present invention, the polishing layer and the buffer layer are laminated through the adhesive member, wherein the adhesive member contains an adhesive layer of a polyester-based hot-melt adhesive or has both sides of the substrate. The double-sided tape of the adhesive layer; the adhesive layer or the double-sided tape has a non-adjacent region of 1 to 40% with respect to the surface area, and the polyester is 100 parts by weight of the polyester resin of the matrix polymer. The hot melt adhesive contains 2 to 10 parts by weight of an epoxy resin having 2 or more epoxy propyl groups in one molecule. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I792225-B |
priorityDate | 2012-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 105.