abstract |
The present invention provides an oxide sintered body obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body was 85% or more, and the average crystal grain size of the crystal grains on the surface of the oxide sintered body was observed to be less than 10 μm. When the oxide sintered body is X-ray-diffracted, the Zn2SnO4 phase and the InGaZnO4 phase are the main phases, and the InGaZn2O5 phase is 3% by volume or less. |