http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201426175-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2012-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76d52e489c713f828a3d5e2740a4002d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc9a29ba90b9f3443d76acddd56968c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_255d5411aa90752bbdec9087ffdf408a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0eff5bcaa2b52b066479417aed0703b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_085b637af5400160bc9eb4b74dbd2ede http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_156cd0ccfd8d84e45134f77d4f5933a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ddf8dda2b1251e6e896697d7b242782 |
| publicationDate | 2014-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201426175-A |
| titleOfInvention | Photoresist composition |
| abstract | The photoresist composition of the present invention comprises an acid-sensitive polymer, and a cyclic ruthenium compound having the formula: (Ra)1-(Ar)-S+(-CH2-)m‧-O3S-(CRb2)n-( L)pX wherein each Ra is independently substituted or unsubstituted C1-30 alkyl, C6-30 aryl, C7-30 aralkyl, or a combination comprising at least one of the foregoing, Ar monocyclic a polycyclic or fused polycyclic C6-30 aryl group, each of which is independently a H, F, a linear or branched C1-10 fluoroalkyl group or a linear or branched chain heteroatom-containing C1 a -10 fluoroalkyl group, an L-based C1-30 linker (containing a hetero atom if necessary, a hetero atom comprising O, S, N, F or a combination comprising at least one of the foregoing heteroatoms), X being substituted or unsubstituted a monocyclic, polycyclic or fused polycyclic cycloaliphatic group of C5 or more carbons (including heteroatoms as needed, heteroatoms including O, S, N, F or a combination comprising at least one of the foregoing), and An integer from 0 to 4, m is an integer from 3 to 20, n is an integer from 0 to 4, and p is an integer from 0 to 2. |
| priorityDate | 2011-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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