http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201425541-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate | 2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c578c9542166b165169c776a92502609 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3da8baa71e616ecfb134d4ebcca7f3c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be835a103388ce1c8816005f37adda0b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3154adcf2e460328da88e14d73998a2d |
| publicationDate | 2014-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201425541-A |
| titleOfInvention | Method and composition for removing metal hard mask |
| abstract | The present invention provides a method for removing a film from a substrate, the method comprising applying a composition to the film, and wherein the composition comprises at least the following: a) water; and b) at least one selected from the group consisting of a compound of the following compound (iv): i) NR4HF2 (chemical formula 1) wherein R = H, an alkyl group, a substituted alkyl group, ii) NR4F (chemical formula 2) wherein R = H, an alkyl group, a substituted group Alkyl, iii) HF (hydrofluoric acid), iv) H2SiF6 (hexafluoroantimonic acid), or v) combinations thereof. The present invention also provides a composition comprising at least the following: a) water; and b) at least one compound selected from the group consisting of the following compounds (iv): i) NR4HF2 (Formula 1) wherein R = H, alkyl, substituted An alkyl group, ii) NR4F (chemical formula 2), wherein R = H, an alkyl group, a substituted alkyl group, iii) HF (hydrofluoric acid), iv) H2SiF6 (hexafluoroantimonic acid), or v) A combination of the same. |
| priorityDate | 2012-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.