http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201423007-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24J2-48
filingDate 2012-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b53d874b9a3037751a4136d9f3bd6dd5
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publicationDate 2014-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201423007-A
titleOfInvention Film forming method for solar collector
abstract The present invention relates to a film forming method for a solar collector for forming a solar-selective absorbing film having high absorptivity and low emissivity on a solar collector. The invention comprises the following steps: A, roughening the heat conduction layer of the metal substrate; B, forming the ruthenium film absorption layer; C, forming the aluminum nitride anti-reflection layer. The heat-conducting layer of the roughened metal substrate can effectively introduce incident sunlight and reduce the amount of reflection, and the roughened surface can also increase the bonding force with the 矽 film absorbing layer to effectively reduce the film splitting phenomenon, and the aluminum nitride anti-reflection The layer can increase the solar thermal energy absorption rate and reduce the emissivity, and the thermal expansion coefficient of the aluminum nitride is close to that of the tantalum, and the high temperature operation can effectively reduce the thermal stress between the tantalum film absorption layer and the aluminum nitride anti-reflection layer.
priorityDate 2012-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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