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publicationDate 2014-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201415641-A
titleOfInvention P-type field effect transistor structure and forming method thereof
abstract An embodiment of the present invention provides a method for forming a p-type field effect transistor structure, including forming a mask layer on a semiconductor substrate, and the mask layer has a semiconductor region with an opening exposing the semiconductor substrate; and performing the semiconductor substrate via the opening of the mask layer The n-type dopant ions are implanted to form an n-type well in the semiconductor region; and the semiconductor substrate is implanted through the opening of the mask layer to form the germanium channel implant region in the n-type well.
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