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filingDate 2013-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c680704882031fe9b1ae902b5e016e4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29e7ba3729dc27cf4aaf4d7afd1974a8
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publicationDate 2014-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201412763-A
titleOfInvention Organic decane precursor for ALD/CVD ruthenium containing film applications
abstract The invention discloses a precursor for forming a Si-containing film, a method for synthesizing the same, and a method for using the vapor deposition process to deposit a germanium-containing film for manufacturing a semiconductor, a photovoltaic device, an LCD-TFT, a flat device, a refractory material or an aerospace material. method.
priorityDate 2012-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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