http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201412370-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02225 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D1-00 |
| filingDate | 2013-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3feb6c563d5ad330bf9c5532bcad9fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7ae0b645a5b9582dd9487953ac7403b |
| publicationDate | 2014-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201412370-A |
| titleOfInvention | Film formation method (1) |
| abstract | The film forming method of the present invention is a polycondensation reaction on the surface of a substrate by a dehydration condensation reaction between a first monomer composed of a difunctional acid anhydride and a second monomer composed of a bifunctional amine group. Forming a film; the step of carrying the substrate into the processing container, heating the substrate to a temperature at which the polyimide film is produced, and then the first processing gas including the first monomer and the second monomer a step of supplying the second processing gas to the substrate, and a step of performing exhaust gas of at least one of the first processing gas and the second processing gas from the processing container; and the first monomer and the second single At least one of the bodies is a non-aromatic monomer. |
| priorityDate | 2012-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.