| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F297-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2013-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bc3c5b89e23107a0f6934390125841f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10e0130c2eb01c60a6881840497e4d02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8480941479d47c204fa40dcbe910dc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b40ada315d0789564192dceb9481ef6d |
| publicationDate |
2014-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201410774-A |
| titleOfInvention |
Pattern forming composition and pattern forming method |
| abstract |
The present invention provides a pattern forming composition comprising a block copolymer comprising a block represented by the following formula (I) and a block represented by the following formula (II). In the following formulas (I) and (II), R1 and R3 each independently represent a hydrogen atom, a methyl group, a fluorine atom or a trifluoromethyl group. R2 is a monovalent organic group. R4 is a (1+b)-valent hydrocarbon group having a carbon number of 1 to 5. R5 is a monovalent group having a hetero atom. m and n are each independently an integer of 10 to 5,000. a is an integer from 0 to 5. b is an integer from 1 to 3. □ |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106243513-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105319844-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106249540-A |
| priorityDate |
2012-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |