| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-42 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate |
2013-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_979296cd8b68517518615c79d97fae3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c45f6415f0bec3a9a901b86b561f511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7913da42cf50d7130f2edcc036e827b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a84d58647708514558ba2ae4cb247dc |
| publicationDate |
2014-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201409603-A |
| titleOfInvention |
Substrate support device and exposure device |
| abstract |
The substrate supporting device of the present invention is provided with a substrate provided with a surface for supporting the optically transparent flexible substrate in a state of being bent with a predetermined curvature or a flat state; and a film body The reflectance of the light used for optical processing (ultraviolet light for exposure, visible light for alignment, etc.) formed on the surface of the above-mentioned substrate is 50% or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I720911-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I729751-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107957660-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107957660-B |
| priorityDate |
2012-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |