http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201409569-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76832 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate | 2013-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7ae0b645a5b9582dd9487953ac7403b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3feb6c563d5ad330bf9c5532bcad9fc |
| publicationDate | 2014-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201409569-A |
| titleOfInvention | Film formation method (2) |
| abstract | The film forming method disclosed in the present invention is a method for forming a film of a polyimide film on the surface of a substrate by dehydration polymerization of a second monomer composed of a difunctional acid anhydride and a second monomer composed of a difunctional amine. The membrane method includes: carrying in a step of carrying the substrate into a processing container; and heating the substrate to heat the temperature at which the polyimide film is produced; and repeating the step of performing a plurality of cycles, the cycle The step of supplying the first processing gas containing the first monomer to the substrate, the step of supplying the second processing gas containing the second monomer to the substrate, and supplying the replacement gas to the step between the two steps In the processing container, a step of replacing the atmosphere in the processing container by a replacement gas; and an exhausting step of discharging at least one of the first processing gas and the second processing gas from the processing container. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111383910-A |
| priorityDate | 2012-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.