| abstract |
The present invention relates to a radiation sensitive resin composition comprising an acid dissociable group-containing polymer, a radiation sensitive acid generator, and a solvent, wherein the radiation sensitive acid generator comprises a compound represented by the following formula (1). In the following formula (1), L is preferably at least one selected from the group consisting of -COO-*, -SO2O-, -CONRA-, -O-, and -S- or a single bond. * indicates the bonding site with G. L of the formula (1) is at least one selected from the group consisting of -COO-*, -SO2O-, -CONRA-, -O-, and -S-, and RA is a hydrogen atom or a carbon number of 1 to 20 a valence hydrocarbon group, R1 is a substituted or unsubstituted alkanediyl group having 1 to 10 carbon atoms adjacent to a fluorine atom not bonded to a carbon atom of SO3-, and G is a group having an alicyclic structure having a carbon number of 3 to 30 , GL-R1-SO3- M+ (1). |