| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c85d78c6a4459b5dbbc49c82a4c5c107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-442 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C1-227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1279 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D153-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-5393
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-375 |
| filingDate |
2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef24e8614b925a72d5243ec7800e3c56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebc5494e80a27ad7a92408047b72d7b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b9ff1c0f9c483315f7afd60fdd674b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f49dee6ae2d37771bd4eae457fab55c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64918f4108a26de575b0de160eb8ea44 |
| publicationDate |
2014-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201406879-A |
| titleOfInvention |
Thermal annealing process |
| abstract |
The present invention provides a method of processing a substrate; wherein the method comprises applying a film comprising a poly(styrene)-intercalation-poly(oxyalkylene) block copolymer component and an antioxidant copolymer composition to the substrate a surface; optionally, baking the film; annealing the film in an atmosphere containing 20 wt% of oxygen; and thereafter treating the annealed film to remove poly(styrene) from the annealed film And converting the poly(oxane) in the annealed film to SiOx. |
| priorityDate |
2012-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |