Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48137 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2933-005 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-005 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 |
filingDate |
2013-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e817d5fc18e85b950a681491cd49cd64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00e9ca6a64ed660719813659d0e411f6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbda0078592e94145b891b6d42041a63 |
publicationDate |
2014-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201405677-A |
titleOfInvention |
Semiconductor device manufacturing method |
abstract |
A method of manufacturing a semiconductor device according to the present invention includes a preparation step of preparing a substrate on which a recess is formed, a terminal disposed in or around the recess, and a semiconductor element disposed in the recess; and a wire bonding step of connecting the terminal with a metal wire And a semiconductor component; a pressure bonding step of pressing the sealing sheet against the upper surface of the concave portion and being spaced apart from the upper surface of the concave portion in a reduced pressure environment; and an atmospheric liberation step of the substrate Freeze with the sealing sheet in an atmospheric environment. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I575617-B |
priorityDate |
2012-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |