| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B1-0233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2013-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0a70e5f02305bc06ffffe12f2083d90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5001f5d1432b932e6510de5efef5d34a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e018dd0449255106d97db7abdeb2caa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35cf0cf16a62d3992c17af4f5a67da1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95b7cef0cd94ebe482f627ec0c69e987 |
| publicationDate |
2014-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201401421-A |
| titleOfInvention |
Method and apparatus for a substrate support having multiple zones of heating |
| abstract |
A substrate processing system and method are provided for controlling substrate heating efficiency and producing a desired temperature profile on the surface of the substrate when the substrate is disposed on a substrate support surface of the substrate support assembly. The substrate support assembly is provided with minimal software control and hardware requirements, and the substrate support assembly includes a heating element that includes a plurality of heating element portions. The heating element is coupled to a power source for adjusting the temperature outputs of the plurality of heating element portions and providing a desired temperature distribution over the substrate support surface of the substrate support assembly within the processing chamber Adjusted multiple heating zones. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I715634-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11133202-B2 |
| priorityDate |
2012-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |