| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T50-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24997
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62884
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B7-22 |
| filingDate |
2013-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4ccf8de3d565306eaf12e7c65d0dddc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9da225554df0144657bbe981e528c192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12b4ffc7a204d72acf45794272ea1c89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e341bd44c2181de3b277562206ef89c |
| publicationDate |
2013-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201350209-A |
| titleOfInvention |
Improved plasma spray coating process for critical chamber components |
| abstract |
In an optimization method for applying a plasma sprayed cerium-containing oxide coating to an article, a plasma power between about 89-91 kilowatts (kW) is selected for use in a plasma spray system. The gas flows through the plasma spray system at a selected gas flow rate of about 115-130 liters per minute. The ceramic powder comprising the cerium-containing oxide is supplied to the plasma spray system at a selected powder feed rate of about 10-30 grams per minute. A ceramic coating of the major portion is then formed on the article based on the selected powder, the selected gas flow rate, and the selected powder feed rate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I701700-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I754243-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11521830-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11017984-B2 |
| priorityDate |
2012-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |