| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2013-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04197a089ce32423929b8c5ab05df04c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e78bdd6c25586c14003ca6e6a7350a33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc6f1daf3fc3f3add847f8a459ccd55e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a376539afdd209080008d481aad2ee95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_646a296935e70e6d967f4effba5bb71d |
| publicationDate |
2013-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201345988-A |
| titleOfInvention |
Chemical mechanical polishing composition with chemical additives and method of use thereof |
| abstract |
The present invention discloses chemical mechanical polishing (CMP) compositions containing chemical additives and methods of using such CMP compositions. The CMP composition comprises an abrasive; a chemical additive; a liquid carrier; any oxidizing agent; a pH buffer and a salt; a surfactant and a biocide. The CMP compositions and methods provide improved removal rates to "SiC", "SiN" and "SiCxNy" films; and "SiC" compared to SiO2, "SiN" compared to SiO2, "SiC" and "SiN" has an adjustable removal selectivity compared to or "SiCxNy" compared to SiO2; wherein x is between 0.1% and 55% by weight and y is between 0.1% and 32% by weight. |
| priorityDate |
2012-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |