| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_01e48e78fadaaec045333f9ad5a6e0b5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D303-23 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2013-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cace3abeffcbcb2a4170b30026a94df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3097c334af2f35e35f49cf8ebc3fd3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b17e4f9553a21fbd5f71b486d76985db |
| publicationDate |
2013-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201344370-A |
| titleOfInvention |
Non-polymeric antireflective composition comprising adamantyl |
| abstract |
The present invention provides non-polymeric compounds, compositions and methods for forming microelectronic structures and structures formed therefrom. The non-polymeric compound is a ring-opening epoxide-adamantane derivative comprising at least two epoxy moieties and at least one adamantyl group, and at least one chemically modifying group bonded to the respective epoxy moieties, such as Chromophore. Antireflective and/or planarizing compositions can be formed using such compounds and can be used in lithographic processes, including the fabrication of microelectronic structures. |
| priorityDate |
2012-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |