http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201340163-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_950bce8d103dab1bd282965fde47f9f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2012-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b163d5a313e1389189785ee6b798b6c9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bcb7ab6f91fef1518d4eff0cc406287 |
| publicationDate | 2013-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201340163-A |
| titleOfInvention | Fluid distribution component assembly and plasma processing equipment |
| abstract | The fluid dispensing component assembly for use in a substrate processing system includes a fluid dispensing component having a central portion and a peripheral portion. The fluid distribution element defines at least one groove formed through the fluid distribution element, and the at least one groove extends along a non-radial path configured to allow the central portion to expand and relative to The peripheral portion is rotated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113013008-A |
| priorityDate | 2012-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.