abstract |
The present invention provides a polishing composition capable of suppressing occurrence of a step on a surface of an object to be polished by corrosion when polishing an object to be polished having a portion containing a group IV material. The present invention relates to a polishing composition used for polishing a polishing object having a portion containing a Group IV material, and is a polishing composition containing an oxidizing agent and an anticorrosive agent. The anticorrosive agent is preferably at least one selected from the group consisting of a compound in which two or more carbonyl groups contained in the molecule are bonded via a carbon atom in the molecule. More specifically, it is preferably at least one selected from the group consisting of a 1,3-diketone compound, a 1,4-diketone compound, and a triketone compound. |