http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201338032-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5c121269689cbab9b3a4548b15caf3
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
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filingDate 2012-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_752561ed0b58c3879fa4915e9a5811c3
publicationDate 2013-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201338032-A
titleOfInvention Solid oxide processing method and device thereof
abstract [Problem] An object of the present invention is to provide a rare earth element, which does not use all abrasives or abrasive grains, and which is extremely difficult to handle, such as hydrofluoric acid, and does not use a solution having a large environmental burden, and may not introduce a processable layer. A method and apparatus for processing solid oxides of solid oxides such as optical glass materials. [Solution] In the presence of water (1), a solid oxide in which one or two or more elements are combined with oxygen is used as a workpiece, and water molecules are dissociated to cut off oxygen and other elements constituting the solid oxide. The back-bonding is used for adsorption, and the catalyst substance which contributes to the formation of decomposition products due to hydrolysis is used as the processing reference surface (3), and the object surface is treated in the presence of water (5) The surface of the processing reference surface is placed in contact with or in close proximity to each other, so that the potential of the machining reference surface does not generate H2 and O2, and the workpiece and the machining reference surface move relative to each other, and the decomposition product is removed from the surface of the workpiece.
priorityDate 2011-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 29.