http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201337464-A

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filingDate 2013-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2cbaa9fef0bd8ec66e14cb425cfb01
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publicationDate 2013-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201337464-A
titleOfInvention Photosensitive ray- or radiation-sensitive resin composition, sensitizing ray-sensitive or radiation-sensitive film, pattern forming method, mold for nanoimprint, blank mask, mask for semiconductor manufacturing, and polymer compound
abstract A photosensitive ray-sensitive or radiation-sensitive resin composition containing a compound (P) containing at least one phenolic hydroxyl group and at least one hydrogen atom derived from a phenolic hydroxyl group by the following formula (1) A group substituted with the indicated group. (wherein M11 represents a single bond or a divalent linking group. Q11 represents an alkyl group, a cycloalkyl group or an aryl group) [Chemical Formula 1]
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priorityDate 2012-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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