http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201336017-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31da94917d1067c89f7e22444c88a836 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0657 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate | 2012-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb1f29fdde8ed963abe40db51fe88021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91373f7a8da448ac12e4b9734893f2f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f5146925656734041580b6c9999225f |
| publicationDate | 2013-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201336017-A |
| titleOfInvention | Method for fabricating a semiconductor device having an isolated region of uniform ladder height |
| abstract | A method of fabricating a semiconductor device is provided. In an embodiment, a method of fabricating a semiconductor device includes forming a planarization stop layer overlying a semiconductor substrate. A trench is etched through the planarization stop layer and into the semiconductor substrate and fills the trench with an isolation material. The spacer material is planarized to establish a top surface of the isolation material that is coplanar with the planarization stop layer. In the method, a dry slag removal process is performed to remove a portion of the planarization stop layer and a portion of the isolation material for lowering the top surface of the isolation material to a desired step height above the semiconductor substrate. |
| priorityDate | 2012-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.