http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201331705-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2012-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5783c924eb99533d01f0b89dc260e78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830b8c370f2092414da814524918af24 |
| publicationDate | 2013-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201331705-A |
| titleOfInvention | Photoresist composition |
| abstract | A photoresist composition comprising: a resin comprising a structural unit represented by the formula (aa): wherein T1 represents a C3-C34 sultone ring group optionally having a substituent, and R1 represents a hydrogen atom, a halogen atom or Optionally, a C1-C6 alkyl group having a halogen atom, R2 represents a C1-C6 alkyl group, R3 represents a hydrogen atom or a C1-C6 alkyl group, and an acid generator represented by the formula (B1): wherein Q1 and Q2 are each independently Represents a fluorine atom or a C1-C6 perfluoroalkyl group, and Lb1 represents a single bond or a C1-C24 divalent aliphatic hydrocarbon group, wherein the methylene group may be replaced by -O- or -CO-, and Y represents a hydrogen atom or C3-C18 An alicyclic hydrocarbon group in which a methylene group may be substituted with -O-, -CO- or -SO2-, and Z+ represents an organic cation. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I601749-B |
| priorityDate | 2011-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 216.