| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-188 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-63 |
| filingDate |
2013-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f76a585eefed281cd9299aa2bea8d4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dca0762e5e44569c35434ad380aace6f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f48620c7898b568a6171a1f0801981c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1a62fffe6926a274f503bda1f17ec4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_421de8a7ac25307ee1b7ecb7b512306a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64dfd211fefbcb9a56bab9744057cfa2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25d7521805be16a952029f2b75da967c |
| publicationDate |
2013-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201331215-A |
| titleOfInvention |
Alkoxyamino decane compound and application thereof |
| abstract |
Described herein are alkoxyaminodecane compounds having the following formula I and methods and compositions for depositing a ruthenium containing film: (R1R2)NSiR3OR4OR5 Formula (I) wherein R1 is independently selected from linear or branched C1 to C10 alkyl groups C2 to C12 alkenyl; C2 to C12 alkynyl; C4 to C10 cyclic alkyl; and C6 to C10 aryl; R2 and R3 are each independently selected from hydrogen; linear or branched C1 to C10 alkyl; C3 to a C12 alkenyl group, a C3 to C12 alkynyl group, a C4 to C10 cyclic alkyl group, and a C6 to C10 aryl group; and R4 and R5 are each independently selected from linear or branched C1 to C10 alkyl groups; C2 to C12 alkenyl; C2 To a C12 alkynyl group; a C4 to C10 cyclic alkyl group; and a C6 to C10 aryl group. |
| priorityDate |
2012-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |