http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201326024-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc905cbef116a1ec61d12125af9427f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y15-00 |
| filingDate | 2011-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ed6514709c85ab3c578d28503bd2fb4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ee4f5107cd9e0b2d08f05d1628e8fe6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15af8b1b173e5ff1353dbf13a8368231 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a2725e8d2ef01e3e7d077b1737e70bd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abc5a515a9ee878bd22266e8fb9709ab |
| publicationDate | 2013-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201326024-A |
| titleOfInvention | Micronano metal structure of molecular detection sensor and manufacturing method thereof |
| abstract | A micro-nano metal structure of a molecular detection sensor and a manufacturing method thereof, comprising: providing a substrate; forming an organic material layer on the substrate; forming a photoresist material layer on the organic material layer; and patterning the photoresist The material layer is formed to form a micro-nano-patterned photoresist layer; the micro-nano-patterned photoresist layer is used as a mask to etch the organic material layer to form a micro/nano pattern organic layer Layer) and exposing a portion of the surface of the substrate; depositing a metal layer on the micro-nano-patterned photoresist layer, on the micro-nano-patterned organic layer, and on a portion of the exposed surface of the substrate; The nano-scale patterned photoresist layer and the micro-nano-patterned organic layer form a micro-nano metal structure. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109470679-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I800366-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I626210-B |
| priorityDate | 2011-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 72.