| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-1208 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1292 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2012-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04fe1429d5f6ccf264917e16ea86773e |
| publicationDate |
2013-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201324597-A |
| titleOfInvention |
Pattern forming method |
| abstract |
A pattern forming method of a fine pattern, comprising the steps of: changing a hydrophilicity and a hydrophobicity of a pattern forming region in which a pattern is formed on a first film having a hydrophilic/hydrophobic conversion function formed on a substrate; and forming a pattern forming region 2 film, the second film is dried to form a pattern. When the thickness of the second film is 0.1 μm, the viscosity is 3 mPa. s below. |
| priorityDate |
2011-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |