http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201324046-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_730848fc69ca7afca2b3c3e10b6cfd92 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfe25c9354f65b1f094b68db2fc948b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37c55c48d1cf96bcf26cf36f7af42a0e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f47ece7492660304240f3aa2173e509d |
| publicationDate | 2013-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201324046-A |
| titleOfInvention | Nano composite negative photosensitive composition and use thereof |
| abstract | The present invention relates to a negative photosensitive composition suitable for imagewise exposure and development as a negative photoresist, which comprises a negative photoresist composition and an inorganic particulate material having an average particle diameter of 10 nm or less, wherein The photoresist coated film has a thickness of less than 5 microns. The negative photoresist composition is selected from the group consisting of (1) a composition comprising: (i) a resin binder, (ii) a photoacid generator, and (iii) a crosslinking agent; or (2) a combination comprising the following (i) a resin binder, (ii) an optionally polymerizable ethylenically unsaturated compound, and (iii) a photoinitiator; or (3) a composition comprising: (i) at least two a photopolymerizable compound of an unsaturated pendant group; (ii) a photopolymerizable ethylenically unsaturated polyalkylene oxide hydrophilic compound; and (iii) a photoinitiator. The invention also relates to a method of forming an image using the novel photosensitive composition. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I720942-B |
| priorityDate | 2011-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 493.