http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201323648-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9eb3196f6e33af80612b4761783d7248 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate | 2011-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19bc0c33fa5ffe56b12e52ff758946b6 |
| publicationDate | 2013-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201323648-A |
| titleOfInvention | Method for producing epitaxial film of metal organic matter |
| abstract | The invention provides a method for manufacturing an epitaxial film of a metal organic substance, which is carried out in a sealed space in which a wafer substrate and an α-ray are preset, and performs the following steps, including: a vacuuming step, and vacuuming the sealed space And maintaining the ultra-vacuum environment; the burning step, in the vacuuming process, the strong acid substance is sucked into the closed space, and the high pressure is applied to the sealed space, and the strong acid substance is instantaneously burned by the vacuum discharge principle, and the instantaneous chemical temperature is reached. At least 1100 degrees; forming step, the instantaneous burning is continued for a period of time, and purified by a sublimation to a complete gas, so that the strong acid substance further starts to discharge by using a high-potential potential difference, and the electrons and nuclei of the molecules of the gas are purified by sublimation The wafer substrate separates the electrons therein, and generates crystals to obtain quality, and is uniformly embedded in the wafer substrate in an orderly manner to form an epitaxial film. The steps are not only low defect rate, but also can improve productivity and quality, and are effective. The effect of reducing the required equipment area and reducing costs. |
| priorityDate | 2011-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.